Abstract

In an environment the various types of hazardous gases are present such as carbon monoxide (CO), nitrogen dioxide (NO2), and sulphur dioxide (SO2) etc. In addition, with these hazardous gases, the vehicle and industry related air pollutions are also the predominant parameters. The CO gas is the most powerful hazard gas mainly affects the human health. So, the main motto of this research article is to provide a strategically measured CO level for low and high range of CO present in the environment using micro electro mechanical system (MEMS) based CO sensing technologies. In the proposed system unmanned aerial vehicle (UAV) is used to measure CO gas in the various altitudes to get an environmental data. The sensor which is used to measure CO is structured with substrate, micro heater, metal oxide semiconductor (MOS) sensing layer and electrode using n-type MOS. The major objective of this research article is to identify the n-type semiconductor to optimize the power. It is used by the MEMS based gas sensor in order to increase the flight time of mini-UAV to measure the CO level in various altitudes and transfer the measured data to the console system for analysis and preventive measures.

Keyword

CO, Environmental air quality monitoring, Metal oxide semiconductors (MOS), MEMS, Mini UAV.

Cite this article

Kumar VV, Sasikala G

Refference

[1][1]Seiyama T, Kato A, Fujiishi K, Nagatani M. A new detector for gaseous components using semiconductive thin films. Analytical Chemistry. 1962; 34(11):1502-3.

[2][2]Korotcenkov G. Metal oxides for solid-state gas sensors: what determines our choice? Materials Science and Engineering: B. 2007; 139(1):1-23.

[3][3]Moseley PT. Solid state gas sensors. Measurement Science and Technology. 1997; 8(3).

[4][4]Shimizu Y, Egashira M. Basic aspects and challenges of semiconductor gas sensors. MRS Bulletin. 1999; 24(6):18-24.

[5][5]Tomchenko AA, Harmer GP, Marquis BT, Allen JW. Semiconducting metal oxide sensor array for the selective detection of combustion gases. Sensors and Actuators B: Chemical. 2003; 93(1-3):126-34.

[6][6]Kung MC, Kung HH. IR studies of NH3, Pyridine, CO, and NO adsorbed on transition metal oxides. Catalysis Reviews Science and Engineering. 1985; 27(3):425-60.

[7][7]Kamegawa T, Takeuchi R, Matsuoka M, Anpo M. Photocatalytic oxidation of CO with various oxidants by Mo oxide species highly dispersed on SiO2 at 293 K. Catalysis Today. 2006; 111(3-4):248-53.

[8][8]Elmi I, Zampolli S, Cozzani E, Mancarella F, Cardinali GC. Development of ultra-low-power consumption MOX sensors with ppb-level VOC detection capabilities for emerging applications. Sensors and Actuators B: Chemical. 2008; 135(1):342-51.

[9][9]Williams DE. Semiconducting oxides as gas-sensitive resistors. Sensors and Actuators B: Chemical. 1999; 57(1-3):1-16.

[10][10]Chintoanu M, Ghita A, Aciu A, Pitl G, Costiug S, Cadar S, et al. Methane and carbon monoxide gas detection system based on semiconductor sensor. In international conference on automation, quality and testing, robotics 2006 (pp. 208-11). IEEE.

[11][11]Kanan SM, El-kadri OM, Abu-yousef IA, Kanan MC. Semiconducting metal oxide-based sensors for selective gas pollutant detection. Sensors. 2009; 9(10):8158-96.

[12][12]Bakrania SD, Wooldridge MS. The effects of the location of Au additives on combustion-generated SnO2 nanopowders for CO gas sensing. Sensors. 2010; 10(7):7002-17.

[13][13]Fine GF, Cavanagh LM, Afonja A, Binions R. Metal oxide semi-conductor gas sensors in environmental monitoring. Sensors. 2010; 10(6):5469-502.

[14][14]Huang J, Wan Q. Gas sensors based on semiconducting metal oxide one-dimensional nanostructures. Sensors. 2009; 9(12):9903-24.

[15][15]Wang C, Yin L, Zhang L, Xiang D, Gao R. Metal oxide gas sensors: sensitivity and influencing factors. Sensors. 2010; 10(3):2088-106.

[16][16]Choi KJ, Jang HW. One-dimensional oxide nanostructures as gas-sensing materials: review and issues. Sensors. 2010; 10(4):4083-99.

[17][17]Sadek K, Moussa W. Studying the effect of deposition conditions on the performance and reliability of MEMS gas sensors. Sensors. 2007; 7(3):319-40.

[18][18]Liu X, Cheng S, Liu H, Hu S, Zhang D, Ning H. A survey on gas sensing technology. Sensors. 2012; 12(7):9635-65.

[19][19]Varon J, Marik PE, Fromm JRE, Gueler A. Carbon monoxide poisoning: a review for clinicians. The Journal of Emergency Medicine. 1999; 17(1):87-93.

[20][20]Raub JA, Mathieu-nolf M, Hampson NB, Thom SR. Carbon monoxide poisoning—a public health perspective. Toxicology. 2000; 145(1):1-14.

[21][21]https://www.bu.edu/articles/2018/air-pollution-inequality-growing-in-massachusetts/. Accessed 10 May 2022.

[22][22]Harper A, Croft-Baker J. Carbon monoxide poisoning: undetected by both patients and their doctors. Age and Ageing. 2004; 33(2):105-9.

[23][23]Goldstein M. Carbon monoxide poisoning. Journal of Emergency Nursing. 2008; 34(6):538-42.

[24][24]Wan J, Suo H, Yan H, Liu J. A general test platform for cyber-physical systems: unmanned vehicle with wireless sensor network navigation. Procedia Engineering. 2011; 24:123-7.

[25][25]Spiess T, Bange J, Buschmann M, Vorsmann P. First application of the meteorological Mini-UAV M2AV. Meteorologische Zeitschrift. 2007; 16(2):159-70.

[26][26]Buschmann M, Bange J, Vörsmann P. 6.7 MMAV—a miniature unmanned aerial vehicle (Mini-UAV) for meteorological purposes. Technische Universität Braunschweig. 2004.

[27][27]Berman ES, Fladeland M, Liem J, Kolyer R, Gupta M. Greenhouse gas analyzer for measurements of carbon dioxide, methane, and water vapor aboard an unmanned aerial vehicle. Sensors and Actuators B: Chemical. 2012; 169:128-35.

[28][28]White BA, Tsourdos A, Ashokaraj I, Subchan S, Zbikowski R. Contaminant cloud boundary monitoring using network of UAV sensors. IEEE Sensors Journal. 2008; 8(10):1681-92.

[29][29]Roldán JJ, Joossen G, Sanz D, Cerro JD, Barrientos A. Mini-UAV based sensory system for measuring environmental variables in greenhouses. Sensors. 2015; 15(2):3334-50.

[30][30]Schibuola L, Tambani C. Indoor environmental quality classification of school environments by monitoring PM and CO2 concentration levels. Atmospheric Pollution Research. 2020; 11(2):332-42.

[31][31]Rossi M, Brunelli D. Autonomous gas detection and mapping with unmanned aerial vehicles. IEEE Transactions on Instrumentation and Measurement. 2015; 65(4):765-75.

[32][32]Villa TF, Gonzalez F, Miljievic B, Ristovski ZD, Morawska L. An overview of small unmanned aerial vehicles for air quality measurements: present applications and future prospectives. Sensors. 2016; 16(7):1-29.

[33][33]Burgués J, Marco S. Multivariate estimation of the limit of detection by orthogonal partial least squares in temperature-modulated MOX sensors. Analytica Chimica Acta. 2018; 1019:49-64.

[34][34]Burgués J, Valdez LF, Marco S. High-bandwidth e-nose for rapid tracking of turbulent plumes. In international symposium on olfaction and electronic nose 2019 (pp. 1-3). IEEE.

[35][35]Emran BJ, Tannant DD, Najjaran H. Low-altitude aerial methane concentration mapping. Remote Sensing. 2017; 9(8):1-13.

[36][36]Ishida H. Blimp robot for three‐dimensional gas distribution mapping in indoor environment. In AIP conference proceedings 2009 (pp. 61-4). American Institute of Physics.

[37][37]Kunz M, Lavric JV, Gerbig C, Tans P, Neff D, Hummelgård C, et al. COCAP: a carbon dioxide analyser for small unmanned aircraft systems. Atmospheric Measurement Techniques. 2018; 11(3):1833-49.

[38][38]McGonigle AJ, Aiuppa A, Giudice G, Tamburello G, Hodson AJ, Gurrieri S. Unmanned aerial vehicle measurements of volcanic carbon dioxide fluxes. Geophysical research letters. 2008; 35(6).

[39][39]Zhou X, Aurell J, Mitchell W, Tabor D, Gullett B. A small, lightweight multipollutant sensor system for ground-mobile and aerial emission sampling from open area sources. Atmospheric Environment. 2017; 154:31-41.

[40][40]Alvarado M, Gonzalez F, Fletcher A, Doshi A. Towards the development of a low cost airborne sensing system to monitor dust particles after blasting at open-pit mine sites. Sensors. 2015; 15(8):19667-87.

[41][41]Burgues J, Marco S. Wind-independent estimation of gas source distance from transient features of metal oxide sensor signals. IEEE Access. 2019; 7:140460-9.

[42][42]Gulia S, Prasad P, Goyal SK, Kumar R. Sensor-based wireless air quality monitoring network (SWAQMN)-a smart tool for urban air quality management. Atmospheric Pollution Research. 2020; 11(9):1588-97.

[43][43]Neumann PP, Hüllmann D, Bartholmai M. Concept of a gas-sensitive nano aerial robot swarm for indoor air quality monitoring. Materials Today: Proceedings. 2019; 12:470-3.

[44][44]Pochwała S, Gardecki A, Lewandowski P, Somogyi V, Anweiler S. Developing of low-cost air pollution sensor—measurements with the unmanned aerial vehicles in Poland. Sensors. 2020; 20(12):1-17.

[45][45]Korotcenkov G. Gas response control through structural and chemical modification of metal oxide films: state of the art and approaches. Sensors and Actuators B: Chemical. 2005; 107(1):209-32.

[46][46]Yamazoe N, Sakai G, Shimanoe K. Oxide semiconductor gas sensors. Catalysis Surveys from Asia. 2003; 7(1):63-75.

[47][47]Yamazoe N. Toward innovations of gas sensor technology. Sensors and Actuators B: Chemical. 2005; 108(1-2):2-14.

[48][48]Labidi A, Gillet E, Delamare R, Maaref M, Aguir K. Ethanol and ozone sensing characteristics of WO3 based sensors activated by Au and Pd. Sensors and Actuators B: Chemical. 2006; 120(1):338-45.

[49][49]Khadayate RS, Chaudhari MT, Disawal SK, Patil PP. Sensing behavior printed WO3 thick films for four organic vapors. Invertis J. Sci. Technol. 2009; 2:185-9.

[50][50]Sahay PP, Tewari S, Jha S, Shamsuddin M. Sprayed ZnO thin films for ethanol sensors. Journal of Materials Science. 2005; 40(18):4791-3.

[51][51]Mädler L, Sahm T, Gurlo A, Grunwaldt JD, Barsan N, Weimar U, et al. Sensing low concentrations of CO using flame-spray-made Pt/SnO2 nanoparticles. Journal of Nanoparticle Research. 2006; 8(6):783-96.

[52][52]Firooz AA, Mahjoub AR, Khodadadi AA. Highly sensitive CO and ethanol nanoflower-like SnO2 sensor among various morphologies obtained by using single and mixed ionic surfactant templates. Sensors and Actuators B: Chemical. 2009; 141(1):89-96.

[53][53]Singh N, Ponzoni A, Gupta RK, Lee PS, Comini E. Synthesis of In2O3–ZnO core–shell nanowires and their application in gas sensing. Sensors and Actuators B: Chemical. 2011; 160(1):1346-51.

[54][54]Seo MH, Yuasa M, Kida T, Huh JS, Yamazoe N, Shimanoe K. Microstructure control of TiO2 nanotubular films for improved VOC sensing. Sensors and Actuators B: Chemical. 2011; 154(2):251-6.

[55][55]Kim HJ, Lee JH. Highly sensitive and selective gas sensors using p-type oxide semiconductors: overview. Sensors and Actuators B: Chemical. 2014; 192:607-27.

[56][56]Hübner M, Simion CE, Haensch A, Barsan N, Weimar U. CO sensing mechanism with WO3 based gas sensors. Sensors and Actuators B: Chemical. 2010; 151(1):103-6.

[57][57]Jimenez I, Vilà AM, Calveras AC, Morante JR. Gas-sensing properties of catalytically modified WO/sub 3/with copper and vanadium for NH/sub 3/detection. IEEE Sensors Journal. 2005; 5(3):385-91.

[58][58]Park JA, Moon J, Lee SJ, Kim SH, Zyung T, Chu HY. Structure and CO gas sensing properties of electrospun TiO2 nanofibers. Materials Letters. 2010; 64(3):255-7.

[59][59]Moon HG, Shim YS, Jang HW, Kim JS, Choi KJ, Kang CY, et al. Highly sensitive CO sensors based on cross-linked TiO2 hollow hemispheres. Sensors and Actuators B: Chemical. 2010; 149(1):116-21.

[60][60]Rao LL, Singha MK, Subramaniam KM, Jampana N, Asokan S. Molybdenum microheaters for MEMS-based gas sensor applications: fabrication, electro-thermo-mechanical and response characterization. IEEE Sensors Journal. 2016; 17(1):22-9.

[61][61]Lee JS, Ha TJ, Hong MH, Park CS, Park HH. The effect of multiwalled carbon nanotube doping on the CO gas sensitivity of TiO2 xerogel composite film. Applied Surface Science. 2013; 269:125-8.

[62][62]Kolmakov A, Zhang Y, Cheng G, Moskovits M. Detection of CO and O2 using tin oxide nanowire sensors. Advanced Materials. 2003; 15(12):997-1000.

[63][63]Du X, George SM. Thickness dependence of sensor response for CO gas sensing by tin oxide films grown using atomic layer deposition. Sensors and Actuators B: Chemical. 2008; 135(1):152-60.

[64][64]Tischner A, Maier T, Stepper C, Köck A. Ultrathin SnO2 gas sensors fabricated by spray pyrolysis for the detection of humidity and carbon monoxide. Sensors and Actuators B: Chemical. 2008; 134(2):796-802.

[65][65]Köck A, Tischner A, Maier T, Kast M, Edtmaier C, Gspan C, et al. Atmospheric pressure fabrication of SnO2-nanowires for highly sensitive CO and CH4 detection. Sensors and Actuators B: Chemical. 2009; 138(1):160-7.

[66][66]Lee CY, Chang CC, Lo YM. Fabrication of a flexible micro CO sensor for micro reformer applications. Sensors. 2010; 10(12):10701-13.

[67][67]Sharma RK, Chan PC, Tang Z, Yan G, Hsing IM, Sin JK. Sensitive, selective and stable tin dioxide thin-films for carbon monoxide and hydrogen sensing in integrated gas sensor array applications. Sensors and Actuators B: Chemical. 2001; 72(2):160-6.

[68][68]Menini P, Parret F, Guerrero M, Soulantica K, Erades L, Maisonnat A, Chaudret B. CO response of a nanostructured SnO2 gas sensor doped with palladium and platinum. Sensors and Actuators B: Chemical. 2004; 103(1-2):111-4.

[69][69]Wang S, Zhao Y, Huang J, Wang Y, Kong F, Wu S, et al. Preparation and CO gas-sensing behavior of Au-doped SnO2 sensors. Vacuum. 2006; 81(3):394-7.

[70][70]Manjula P, Arunkumar S, Manorama SV. Au/SnO2 an excellent material for room temperature carbon monoxide sensing. Sensors and Actuators B: Chemical. 2011; 152(2):168-75.

[71][71]Zhao L, Choi M, Kim HS, Hong SH. The effect of multiwalled carbon nanotube doping on the CO gas sensitivity of SnO2-based nanomaterials. Nanotechnology. 2007; 18(44).

[72][72]Wang CT, Chen MT. Vanadium-promoted tin oxide semiconductor carbon monoxide gas sensors. Sensors and Actuators B: Chemical. 2010; 150(1):360-6.

[73][73]Ghosh S, Narjinary M, Sen A, Bandyopadhyay R, Roy S. Fast detection of low concentration carbon monoxide using calcium-loaded tin oxide sensors. Sensors and Actuators B: Chemical. 2014; 203:490-6.

[74][74] Nikan E, Khodadadi AA, Mortazavi Y. Highly enhanced response and selectivity of electrospun ZnO-doped SnO2 sensors to ethanol and CO in presence of CH4. Sensors and Actuators B: Chemical. 2013; 184:196-204.

[75][75]Jeun JH, Kim DH, Hong SH. SnO2/CuO nano-hybrid foams synthesized by electrochemical deposition and their gas sensing properties. Materials Letters. 2013; 105:58-61.

[76][76]Bai S, Guo W, Sun J, Li J, Tian Y, Chen A, et al. Synthesis of SnO2–CuO heterojunction using electrospinning and application in detecting of CO. Sensors and Actuators B: Chemical. 2016; 226:96-103.

[77][77]Kim H, Park CS, Kang KM, Hong MH, Choi YJ, Park HH. The CO gas sensing properties of direct-patternable SnO2 films containing graphene or Ag nanoparticles. New Journal of Chemistry. 2015; 39(3):2256-60.

[78][78]Al-Kuhaili MF, Durrani SM, Bakhtiari IA. Carbon monoxide gas-sensing properties of CeO2–ZnO thin films. Applied Surface Science. 2008; 255(5):3033-9.

[79][79]Choi KI, Kim HR, Lee JH. Enhanced CO sensing characteristics of hierarchical and hollow in 2O3 microspheres. Sensors and Actuators B: Chemical. 2009; 138(2):497-503.

[80][80]Fu H, Hou C, Gu F, Han D, Wang Z. Facile preparation of rod-like Au/In2O3 nanocomposites exhibiting high response to CO at room temperature. Sensors and Actuators B: Chemical. 2017; 243:516-24.

[81][81]Mahdi M. Ultra-low power MEMS micro-heater device. Microsystem Technologies. 2021; 27(8):2913-7.

[82][82]Liu H, Yu H, Wang J, Xia F, Wang C, Xiao J. LaNbO4 as an electrode material for mixed-potential CO gas sensors. Sensors and Actuators B: Chemical. 2022.

[83][83]Fitriana F, Septiani NL, Irzaman I, Ferdiansjah F, Fahmi MZ, Adhika DR, et al. Preparation of (002)-oriented ZnO for CO gas sensor. Materials Research Express. 2019; 6(6).

[84][84]Kothawade NB, Deshmane VV, Patil AV. MoO3: in 2O3 binary oxide thin films as CO gas sensor. International Journal of Microstructure and Materials Properties. 2020; 15(3):229-41.

[85][85]Li S, Pu J, Zhu S, Gui Y. Co3O4@ TiO2@ Y2O3 nanocomposites for a highly sensitive CO gas sensor and quantitative analysis. Journal of Hazardous Materials. 2022.

[86][86]Alwan AM, Abed HR, Rashid RB. Enhancing the temporal response of modified porous silicon-based CO gas sensor. Solid-State Electronics. 2021.

[87][87]Amoresi RA, De ORC, Cichetto JL, Desimone PM, Aldao CM, Ponce MA, et al. Pure and Ni2O3-decorated CeO2 nanoparticles applied as CO gas sensor: experimental and theoretical insights. Ceramics International. 2022; 48(10):14014-25.

[88][88]Xie D, Liu R, Adedokun G, Xu L, Wu F. A novel low power hexagonal gas sensor cell for multi-channel gas detection. In 34th international conference on micro electro mechanical systems 2021 (pp. 430-3). IEEE.

[89][89]Sumaria V, Goel N, Bart S. Stress effects in semiconducting metal oxide (SMOx) materials on MEMS gas sensors. In IEEE Sensors (pp. 1-4). IEEE.

[90][90]Xie D, Liu R, Adedokun G, Wu F, Rong Q, Xu L. A low power 4-channel single-cantilever metal-oxide gas sensor cell with gas identification capability. In 21st international conference on solid-state sensors, actuators and microsystems (Transducers) 2021 (pp. 160-3). IEEE.

[91][91]Lee YC, Lin SW, Liou CS, Tsou C, Fang W. A CMOS-MEMS fluorescence quenching gas sensor encapsulated with silicon-based LED reflector. In international conference on solid-state sensors, actuators and microsystems (Transducers) 2021 (pp. 783-6). IEEE.

[92][92]Wang J, Gu W, Qi W, Li C, Chen D, Adedokun G, et al. A fully integrated gas detection system with programmable heating voltage and digital output rate for gas sensor array. IEEE Sensors Journal. 2020; 21(5):6821-9.

[93][93]Akasaka S, Kanno I. Limiting current-type MEMS oxygen gas sensor integrated with micro-hotplate. In sensors 2021 (pp. 1-4). IEEE.

[94][94]Weng CH, Pillai G, Li SS. A mass sensor based on an aluminum nitride mems oscillator for gas sensing applications. In international conference on solid-state sensors, actuators and microsystems (Transducers) 2021 (pp. 1287-90). IEEE.

[95][95]Deshmukh S, Gawande T. Design of experiments for optimizing and selectivity study of mems sensor array based electronic nose for hazardous gases measurement. In international conference on electronics, computing and communication technologies 2021 (pp. 1-5). IEEE.

[96][96]Hernandez LI, Shanmugam P, Michaud JF, Alquier D, Certon D, Dufour I. Hydrogen selective gas sensor based on attenuation measurement of acoustic wave using uncoated CMUT. In 34th international conference on micro electro mechanical systems 2021 (pp. 398-401). IEEE.

[97][97]Hayashi Y, Akimoto Y, Hiramatsu N, Masunishi K, Saito T, Yamazaki H, et al. Smoldering fire detection using low-power capacitive MEMS hydrogen sensor for future fire alarm. In international conference on solid-state sensors, actuators and microsystems (Transducers) 2021 (pp. 267-70). IEEE.

[98][98]PrudHA, Nabki F. An 8 mW fully integrated regenerative resonant MEMS CO 2 sensor using linear polyethylenimine as a capture layer. IEEE Sensors Journal. 2020; 21(5):5904-13.

[99][99]Yuan Z, Yang F, Meng F, Zuo K, Li J. Research of low-power MEMS-based micro hotplates gas sensor: a review. IEEE Sensors Journal. 2021; 21(17):18368-80.

[100][100]Liu R, Xie D, Adedokun G, Xue F, Xu L, Wu F. A low power bridge-type gas sensor with enhanced sensitivity to ethanol by sandwiched ZnO/Au/ZnO film sputtered in O₂ atmosphere. IEEE Sensors Journal. 2021; 21(17):18578-87.

[101][101]Ng DK, Ho CP, Xu L, Zhang T, Siow LY, Ng EJ, et al. Cmos-Mems SC 0.12 AL 0.88 N-based pyroelectric infared detector with CO2 gas sensing. In 34th international conference on micro electro mechanical systems 2021 (pp. 852-5). IEEE.

[102][102]Akshya S, Juliet AV. A computational study of a chemical gas sensor utilizing Pd–rGO composite on SnO2 thin film for the detection of NOx. Scientific Reports. 2021; 11(1):1-18.

[103][103]Fang SY, Zhuang YQ, Hsueh TJ, Shih TT. Influence of silver glue on the die bonding process of MEMS gas sensors. In international symposium on intelligent signal processing and communication systems 2021 (pp. 1-2). IEEE.

[104][104]Panahi A, Ghasemi P, Sabour MH, Magierowski S, Ghafar-Zadeh E. Design and modeling of a new MEMS capacitive microcantilever sensor for gas flow monitoring. IEEE Canadian Journal of Electrical and Computer Engineering. 2021; 44(4):467-79.

[105][105]Filipovic L. Reliability and stability of MEMS microheaters for gas sensors. In international integrated reliability workshop 2021 (pp. 1-10). IEEE.

[106][106]Xue F, Xie D, Liu R, Adedokun G, Xu L, Wu F. A warped-cantilever MEMS MOS gas sensor array. In 21st international conference on solid-state sensors, actuators and microsystems (Transducers) 2021 (pp. 823-6). IEEE.

[107][107]Xu W, Wang X, Mousa B, Paszkiewicz M, Lee YK. A CMOS MEMS thermal flow sensor for gas and liquid with parylene-C coating. IEEE Transactions on Electron Devices. 2020; 68(2):919-22.

[108][108]Li X, Yuan Y, Li Y, Liu J, Li S, Liu Y, Cheng Y. Finite element simulation analysis of temperature field of MEMS gas sensor based on ANSYS software. In 3rd international conference on artificial intelligence and advanced manufacture 2021 (pp. 468-71). IEEE.

[109][109]Xue F, Adedokun G, Xie D, Liu R, Zhang Y, Muhammad M, et al. A low power four-channel metal oxide semiconductor gas sensor array with T-shaped structure. Journal of Microelectromechanical Systems. 2022; 31(2):275-82.

[110][110]Peng Y, Bulbul A, Noh S, Khan SU, Kim KH, Kim H. A graphene-based thermal conductivity detector for low power gas detection. In 34th international conference on micro electro mechanical systems 2021 (pp. 787-90). IEEE.

[111][111]Kulkarni VS, Chorage SS. MEMS interdigital electrode sensor design for gas sensing mechanism. In international conference on emerging smart computing and informatics 2021 (pp. 258-62). IEEE.

[112][112]Rananavare M, Shah R, Makwana M, Rathod SS. Design and simulation of microfluidic based carbon monoxide gas sensor using COMSOL multiphysics®. In international conference on advances in computing, communication, and control 2021 (pp. 1-4). IEEE.

[113][113]Momin MA, Wang Z, Toda M, Yamazaki M, Moorthi K, Kawaguchi Y, et al. Development of nanomechanical multisensory arrays for detection of hazardous volatile materials and gases. In 35th international conference on micro electro mechanical systems conference 2022 (pp. 732-4). IEEE.

[114][114]Algamili AS, Khir MH, Ahmed AY, Al-mahdi OL, Ba-hashwan SS, Alabsi SS. Modeling of the PolyMUMPs-based MEMS sensor for application in trace gas detection. In international conference on intelligent cybernetics technology & applications 2021 (pp. 58-63). IEEE.

[115][115]Filipovic L, Selberherr S. Gas sensing with two-dimensional materials beyond graphene. In 32nd international conference on microelectronics 2021 (pp. 29-36). IEEE.

[116][116]Gawande T, Hazra P, Deshmukh S. Multivariant partial least square and gradient decent regularization for transfer of training models in MEMS based gas sensor arrays. In international conference for emerging technology 2021 (pp. 1-4). IEEE.

[117][117]Bhardwaj R, Hazra A. MXene-based gas sensors. Journal of Materials Chemistry C. 2021; 9(44):15735-54.

[118][118]Kotbi A, Imran M, Kaja K, Rahaman A, Ressami EM, Lejeune M, et al. Graphene and g-C3N4-based gas sensors. Journal of Nanotechnology. 2022.

[119][119]Yuan H, Li N, Fan W, Cai H, Zhao D. Metal‐organic framework based gas sensors. Advanced Science. 2022; 9(6).

[120][120]KiliÇ A, Alev O, Büyükköse S. Microfabrication of metal oxide based gas sensors. In 5th international symposium on multidisciplinary studies and innovative technologies 2021 (pp. 207-10). IEEE.

[121][121]Ghuge RS, Shinde MD, Rane SB. Bismuth-based gas sensors: a comprehensive review. Journal of Electronic Materials. 2021; 50(11):6060-72.

[122][122]Masuda Y. Recent advances in SnO2 nanostructure based gas sensors. Sensors and Actuators B: Chemical. 2022.

[123][123]Verma G, Gupta A. Recent development in carbon nanotubes based gas sensors. Journal of Materials NanoScience. 2022; 9(1):3-12.

[124][124]Gondim AC, Guimarães WG, Sousa EH. Heme-based gas sensors in nature and their chemical and biotechnological applications. BioChem. 2022; 2(1):43-63.

[125][125]Yadav A, Sinha N. Nanomaterial-based gas sensors: a review on experimental and theoretical studies. Materials Express. 2022; 12(1):1-33.

[126][126]Afsheen S, Ahmad A, Iqbal T, Ijaz M, Bashir A. Optimizing the sensing efficiency of plasmonic based gas sensor. Plasmonics. 2021; 16(2):541-6.

[127][127]Boubrima A, Knightly EW. Robust environmental sensing using UAVs. ACM Transactions on Internet of Things. 2021; 2(4):1-20.

[128][128]Piñeres-espitia G, Butt SA, Cañate-masson M, Alvarez-navarro A, Hassan SA, Gochhait S. Gas sensing system using an unmanned aerial vehicle. In international conference for convergence in technology (I2CT) 2021 (pp. 1-7). IEEE.

[129][129]Kumar VV, Sasikala G. Internet of things (IoT) enabled air quality monitoring system for conventional and UAV application. Nature Environment & Pollution Technology. 2022; 21(1):71-81.

[130][130]Samotaev N, Dzhumaev P, Oblov K, Pisliakov A, Obraztsov I, Ducso C, et al. Silicon MEMS thermocatalytic gas sensor in miniature surface mounted device form. Chemosensors. 2021; 9(12):1-10.

[131][131]Sharma R, Arya R. Sharma R, Arya R. UAV based long range environment monitoring system with industry 5.0 perspectives for smart city infrastructure. Computers & Industrial Engineering. 2022.