Plasmonics based VLSI processes
Shreya Bhattacharya
Abstract
In continuum to my previous paper titled ‘Implementation of plasmonics in VLSI’, this paper attempts to explore further, the actual physical realization of an all-plasmonic chip. In this paper, various methods of plasmon-based photolithography have been discussed and an observation is made w.r.t the cost effectiveness and ease of adaptability. Also, plasmonics based active element has been discussed which would help unravel further arenas of approaches and methods towards the realization of an all-plasmonic chip.
Keyword
Waveguide Ring Resonator, photolithography, plasmons, sub-wavelength.